Iklanyelwe umgomo-okuzenzakalelayo okubalulekile, -Imojuli Yesinxephezelo Sokunemba Kochungechunge ilethaukulungisa iphutha le-4-DOF eliguqukayongesinxephezelo esivunyelanisiwe se-XYZ-se-axis linear displacement (±0.4μm ukulungiswa) kanye ne-Z-isinxephezelo sokuphenduka kwe-axis angular (±1.2 arc{4}}isekhondi). Le sistimu isusa amaphutha okuma anqwabelene ku-semiconductor die bonding, amaseli e-optical assembly, kanye nokukhiqizwa kwedivayisi yezokwelapha lapho ukukhukhuleka okushisayo kanye nokudlidliza kwe-harmonics kuphazamisa ukuphuma.
Impumeleloindlela yokuguquguquka esebenzayoihlanganisa ama-actuator ekhoyili yezwi nokulayisha kuqala-ukuxhumana okulungiselelwe kwepharalelogramu, ukuzuza30% izikhathi zokuxazulula ngokusheshakunezinye izindlela ze-piezoelectric. Izinzwa ezihlanganisiwe ze-interferometric zihlinzeka ngempendulo yesikhathi esingu-10nm sangempela-, kuyilapho uziro{3}}isisekelo sobumba se-CTE sigcina ukuqina okushisayo okungu-±0.07μm/℃emijikelezweni yokukhiqiza yamahora angu-48.Iqinisekisa ukunemba kwezinga le-micron-kumisebenzi yokufaka ingxenye enembayo (±5μm ukuphinda-phinda), kubalulekile ekuhlanganiseni -kwe-LED{1}}kanye{2}}nendawo nesixhumi se-fiber optic.
Izinzuzo Eziyinhloko Zezobuchwepheshe
I-Hysteresis-Isinxephezelo Samahhala Somugqa
Ilungisa amaphutha womzila ongu-150μm ngezilinganiso zokubuyekeza ezingu-500Hz.
I-Active Vibration Isolation
Yehlisa i-amplitude ngo-18dB (5-200Hz ububanzi).
I-Multi-Spectral Referencing
Iqinisekisa isikhundla njalo ngo-0.2ms nge-laser triangulation.
I-ISO 230-2/SEMI S22 Iyahambisana
Igunyazwe amagumbi okuhlanza ekilasi le-10.
Kufakazelwe{0}}Ngezinqubo Zenani Eliphezulu
I-Semiconductor Die Namathisela
Ithola ukunemba kokubeka okungu-±3μm ku-12,000 UPH.
Ukuqondaniswa kwe-Optical Lens
Igcina ukubekezelela kwe-angular okungu-0.005 ngesikhathi sokwelashwa kwe-UV.
I-Medical Catheter Tip Assembly
Ifaka izingxenye ezingu-0.3mm ezinokuphinda ±5μm.
I-Quantum Sensor Packaging
Isekela i-coplanarity engu-0.8μm ngaphansi kokudlidliza okungu-10kHz.
Isixhumi esibonakalayo se-EtherCAT semojuli siyasebenza<250μs synchronization with robots. Hermetic gold-plated connectors exceed MIL-STD-202H specifications, while mu-metal shielding blocks EMI up to 200MHz. NIST-traceable calibration ensures 99.5% measurement confidence over 5-year service life.
Cela iyunithi yedemo yamahhalaukuze kuqinisekiswe ukuthi A-Amamojula ochungechunge akhuphula kanjani isivuno se-semiconductor ngo-22% futhi ehlise izinga lokuchithwa kwemishini yezokwelapha ngo-65%.
Amashadi ashisayo: iyunithi yesinxephezelo, i-China iyunithi yesinxephezelo abakhiqizi, abahlinzeki, imboni
